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Products

Overview

SALDtech offers S-ALD deposition tools that enable the our customers to deposit atomic scale layers at high speed and low cost of ownership, enabled by SALDtech’s proprietary plasma technology. For R&D and process optimisation we offer a flexible tool which can be used for any layer and kind of substrate .The optimized process can be transferred one to one to our high volume production tools for medium to large area substrates.

Our offering includes:

  • R&D-tools: a versatile and flexible tool for labs, R&D- and pilot lines
  • Large area sheet-to-sheet tools: for mass production of m2-scale products
  • Roll-to-roll tools: for mass production of flexible products

Highly versatile R&D tool

Saldtech offers a multifunctional ALD tool for R&D purposes. This tool can be used to deposit a wide range of materials on substrates up to 30 by 30 cm. Substrates can be round, square, flexible and rigid.

 

Key features
Substrate size (W x L x T) Any size or shape up to 300 x 300 x 5 mm
Wafer diameters 150 – 300 mm
Operating pressure Atmospheric pressure
Deposition rate (Al2O3) Up to 0.5nm/s
Thickness non uniformity (Al2O3) < 2%
Deposition temperature range 50-200 oC
Precursor sources Up to 3
Co-reactant Multi-purpose atmospheric plasma or H2O
Control system PLC with  PC user interface
Glove box & antechamber

ISO class 5

Optional

Optional

Dimensions (W x L x H) 2.6 x 1.1 x 1.8 m

S2S tool for large area

The large area S2S tool offers deposition on substrates up to 1 by 1.5 m. Throughput is up to 20 substrates per minute, depending on material and deposition temperature. Layer material can be choosen according customers wish. Watch here how it works.
Key features

Substrate size (W x L x T)

Up to 1000 x 1500 x 3 mm

Operating pressure

Atmospheric pressure

Deposition rate (Al2O3)

Up to 0.5nm/s

Thickness non uniformity (Al2O3)

< 2%

Deposition temperature range

50-150 oC

Precursor sources

1

Co-reactant

Multi-purpose atmospheric plasma or H2O

Control system

PLC with  PC user interface

ISO class 5

Optional

Dimensions (W x L x H)

2.4 x 6.4 x2.2 m

R2R mass production tool

We also offer a R2R high volume production tool. The webwidth can be adjusted according the customers wish between 30 and 200cm with a webspeed up to 60 m/min. The layers can be choosen according the process erquirement as well. SALDtech cooperates with its partners VDL – ETG for the production of this tool and their extended knowledge on web handling equipment.

Key features

web width

30 -200 cm

Operating pressure

Atmospheric pressure

Dynamic deposition rate per drum

200- 250 nm m/minute

Thickness non uniformity (Al2O3)

< 2%

Deposition temperature range

50-150 oC

Web speed  

Up to 60 m/minute

Co-reactant

Multi-purpose atmospheric plasma or H2O

Control system

PLC with  PC user interface

Dimensions (W x L x H)

Depending on design

Interested?

SALDtech products help grow your business. Are you interested? Then please contact us.