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Products

Overview

SALDtech offers Spacious-ALD deposition tools that enable our customers
to deposit atomic scale layers at high speed and low cost of ownership.

Equipped with SALDtech’s proprietary plasma technology we offer several product series, each with its unique field of application.

From versatile lab tools – the Labline series to highly efficient mass production FAB tools. Both sheet-to-sheet – Vellum series and roll-to-roll applications – Omega series

This combined with excellent process and application support – we are the ideal partner for all your S-ALD needs.

Our product portfolio consists of:

  • Labline series: versatile and flexible tool
  • Vellum series: mass production tool for flat, sheet-to-sheet applications
  • Omega series: mass production tool for flexible substrates – roll-to-roll applications

SALDtech – Labline series

The Versatile tool for pilot, proof of concepting and development purposes

Available in 6” and 12” setup

 

Labline 6
Labline 6 Base system configuration
Free sample envelope 175(x) x 215(y) x 0,1-5(z) mm
Deposition area 175(x) x 150(y) mm
Deposition rate (Al2O3) Up to 0,5 nm/s
Thickness non uniformity (Al2O3) <2%
Operating pressure Atmospheric pressure
Deposition temperature range 50 – 250 °C
Deposition system 3 slot design
Co-reactant Plasma or Thermal
Control system PLC with PC User Interface
Glovebox Included
Antechamber (Loadlock) Included manual
Scrubber Included or point of use
ISO class 5 Optional
Dimensions 2,6(W) x 1,1(L) x 1,8(H) m
Accessories / options
Sample holders 6” wafer holder
Double 4” wafer holder
Foil / membrane holder (150x150mm)
Substrate specific holders on request
Patterning Yes, with plasma co-reactant
Labline 12
Labline 12 Base system configuration
Free sample envelope 320(x) x 360(y) x 0,1-5(z) mm
Deposition area 320(x) x 300(y) mm
Deposition rate (Al2O3) Up to 0,5 nm/s
Thickness non uniformity (Al2O3) <2%
Operating pressure Atmospheric pressure
Deposition temperature range 50 – 250 °C
Deposition system 3 slot design
Co-reactant Plasma or Thermal
Control system PLC with PC User Interface
Glovebox Included
Antechamber (Loadlock) Included manual
Scrubber Included or point of use
ISO class 5 Optional
Dimensions 2,6(W) x 1,1(L) x 1,8(H) m
Accessories / options
Sample holders 12” wafer holder
6” wafer holder
Double 4” wafer holder
Foil / membrane holder (150x150mm)
Foil / membrane holder (300x300mm)
Substrate specific holders on request
Patterning Yes, with plasma co-reactant

SALDtech – Vellum series: large area fab solution

The large area S2S tool offers deposition on substrates up to 1 by 1.5 m. Throughput is up to 20 substrates per minute, depending on material and deposition temperature. Layer material can be choosen according customers wish. Watch here how it works.

Key features

Substrate size (W x L x T)

Up to 1000 x 1500 x 3 mm

Operating pressure

Atmospheric pressure

Deposition rate (Al2O3)

Up to 0.5nm/s

Thickness non uniformity (Al2O3)

< 2%

Deposition temperature range

50-150 oC

Precursor sources

1

Co-reactant

Multi-purpose atmospheric plasma or H2O

Control system

PLC with  PC user interface

ISO class 5

Optional

Dimensions (W x L x H)

2.4 x 6.4 x2.2 m

SALDtech – Omega series: roll-to-roll fab solution

We also offer a R2R high volume production tool. The webwidth can be adjusted according the customers wish between 30 and 200cm with a webspeed up to 60 m/min. The layers can be choosen according the process erquirement as well. SALDtech cooperates with its partners VDL – ETG for the production of this tool and their extended knowledge on web handling equipment.

Key features

web width

30 -200 cm

Operating pressure

Atmospheric pressure

Dynamic deposition rate per drum

200- 250 nm m/minute

Thickness non uniformity (Al2O3)

< 2%

Deposition temperature range

50-150 oC

Web speed  

Up to 60 m/minute

Co-reactant

Multi-purpose atmospheric plasma or H2O

Control system

PLC with  PC user interface

Dimensions (W x L x H)

Depending on design

Interested?

SALDtech products help grow your business. Are you interested? Then please contact us.